干涉仪&标准镜
卧式干涉仪
- 可定制性:根据需求更换不同波长的光源或其他配置。。
- 实用性强:适用于中小型光学加工企业,操作简便。
作为光学加工公司,我们对干涉仪的使用和实际功能有更好的了解。基于我们光学的垂直整合能力,开发了我们自有品牌的干涉仪系列。该系列干涉仪适用于中小型和大型光学加工公司,非常易于操作。 当然我们也可以根据客户特殊的要求定制干涉仪
Parameter | Measurement and units |
Test Beam Diameter | 4 inches (102 mm) |
Alignment FOV | 3 degrees |
Optical Centerline | 4.25 in. (108 mm) |
Laser Source | HeNe, Class IIIa |
Wavelength | 632.8 nm |
Polarization | Nominally circular |
Camera Resolution | 1,024 x 1,024 pixels |
Camera Frame Rate | 70 fps |
Acquisition Time | 300ms |
Digitization | 8, 10, 12 or 16 |
Magnification | 1-6x motorized |
Pupil Focus Range Motorized | ±2.5 m |
Alignment | Twin spot |
Hand Controller Remote | zoom, focus, intensity |
Computer | High-performance PC, Latest Windows 64 bit |
Software | Apre |
Power | 100 to 240 VAC, 50/60 Hz |
Temperature Range Operational | 15 to 30°C (59 to 86°F) |
Storage Temperature Range | 0 to 50°C |
Rate of Temp. Change | <1.0°C per 15 min |
Humidity | 5 to 95% relative, non-condensing |
Vibration Isolation | passive isolation system |
立式干涉仪
- 高效率:可用于工业大批量生产,快速检测。
- 非接触式检查方法:避免表面损伤。
PHASE SHIFT是一个容易操作、测试效率高的设备,适用于光学加工,用非接触式的检验方法检测光学零件的面型和曲率半径,可以避免表面损坏,也不需要做测试样板。
Parameter | Measurement and units | |
Principle | Fizeau interferometer | |
Effective diameter | 100mm | |
Interpretation of surface figure | visual Interpretation | |
Measurement Range of radius | concave | 3-500mm |
convex | According to the TS | |
Max measurement diameter | According to the TS | |
Wavelength | 632.8 nm | |
Alignment | Twin spot | |
Accuracy of radius | R>3-100mm ΔR≤0.01mm | |
R>100-300mm ΔR≤0.03mm | ||
R>300-500mm ΔR≤0.05mm | ||
ΔR=|A-B| | ||
Light source | He-Ne laser | |
Vibration Isolation | air cushion vibration isolation | |
Other configuration
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Steel framed structure, marble platform, measuring system inverted, three-jaw holder, step motor lifting. |
标准镜头
MTS系列标准镜头是一种高质量的精密镜头,专门用于高精度光学元件的面形和光学系统波前等的干涉计量测量。其参考镜采用熔融石英,热稳定性好,参考面精度达到λ/20或以上。
60mm | 30mm | ||||||
Type | F0.7 | F1.0 | F2.0 | F0.65 | F1.0 | F1.4 | F2.0 |
F number | 0.7 | 1 | 2 | 0.65 | 1 | 1.4 | 2 |
Radius of reference surface (mm) | 23.08 | 43.38 | 105.58 | 11.268 | 21.498 | 32 | 52 |
Max.test diameter convex (mm) | Φ32 | Φ44 | Φ54.6 | Φ17 | Φ21.44 | Φ32 | Φ28 |
Max.test radius convex (mm) | 21.45 | 41.64 | 102.9 | 10.86 | 20.348 | 30.386 | 50.366 |
Transmitted Wavefront (PV) | <1.5λ | <1.5λ | <1λ | <1.5λ | <1.5λ | <1λ | <1λ |
Quality of reference surface (PV) | λ/20 | ||||||
Reflectivity of reference surface | 4% | ||||||
Mechanical mount | Fujinon F601 Bayonett |
100mm | ||||||||
Type | F0.75 | F1.5 | F3.3 | F5.6 | F7.2 | F11 | 4”-2”Converter | 4”-6”Converter |
F number | 0.75 | 1.5 | 3.3 | 5.6 | 7.2 | 11 | ||
Radius of reference surface(mm) | 48.34 | 121.47 | 309.13 | 530.43 | 686.49 | 1064.79 | ||
Max.test diameter convex(mm) | Φ66 | Φ84 | Φ92.4 | Φ98 | Φ99 | Φ99 | ||
Max.test radius convex(mm) | 45.7 | 119.01 | 294.44 | 521.37 | 678.8 | 1056.45 | ||
Transmitted Wavefront(PV) | <1.5λ | <1.5λ | <1λ | <0.5λ | <0.5λ | <0.5λ | <3λ | <3λ |
Quality of reference surface(PV) | λ/20 | |||||||
Reflectivity of reference surface | 4% | |||||||
Mechanical mount | Zygo Bayonett |
152.4mm Transmission Flat | ||||||||||
Type | F1.1 | F2.2 | F3.2 | F5.3 | F7.2 | TF100 | TF150 | TF200 | TF300 | |
F number | 1.1 | 2.2 | 3.2 | 5.3 | 7.2 | 100 | 150 | 200 | 300 | |
Radius of reference surface (mm) | 123 | 290 | 476 | 776 | 1045 | |||||
Max.test diameter convex (mm) | 117 | 143 | 144 | 144 | 144 | |||||
Max.test radius convex (mm) | 121 | 271 | 451 | 751 | 1014 | |||||
Transmitted Wavefront (PV) | <1.5λ | <1.5λ | <1.5λ | <1.5λ | <1.5λ | |||||
Quality of reference surface (PV) | λ/20 | |||||||||
Reflectivity of reference surface | 4% | |||||||||
Mechanical mount | Zygo Bayonett |