波前测试设备
我们的波前测试模块
- 可定制:根据需求可改变不同波长的光源,改变不同的波前空间分辨率。
- 高效率:可用于工业大批量生产阶段,快速检测光波前。
该设备主要由光源模块、成像光路模块、运动控制模块、相机模块、软件分析模块组成。通过对光路的精密装调,加之以精准的算法,实现整个设备的波前测试功能。系统通过切换大小口径不同的准直镜,并使用拼接的方式,实现了由低分辨率到高分辨率的转换,为高分辨率的波前测试需求提供了解决方案,解决了大口径产品的波前测试问题。
Test function | Transmissive wavefront | – | √ |
Reflective wavefront | – | √ | |
Wavefront stitching | – | To increase scan area at higher spatial resolution than sensor can support | |
Optics | Wavelength | nm | 633 or customized |
Laser power | watt | 0~20mw | |
Magnification factor | X | 4 or customized | |
Wavefront spatial resolution | pixel | Default resolution:73×45 | |
high resolution:298×180 | |||
Or per customized magnification | |||
Wavefront accuracy | λ | λ / 25~80 or customization | |
Test area size | mm | 75×75 or per customization | |
Test time | Takt time | fps | 8-64 |
sec | Per # of stitching zones | ||
Interface | Driving voltage | V | 220 |
Electrical power | watt | 100 | |
Motor control cable | USB | ||
WFS cable | USB | ||
Dimension | Width | mm | 620 |
Length | mm | 1000 | |
Height | mm | 280 | |
Weight | kg | 170 | |
Environments | Operation temperature | ℃ | 22+/-4 |
Store temperature | ℃ | 22+/-20 |
我们的红外波前测试模块
- 高效率:可用于工业大批量生产阶段,快速检测光波前。
- 即时评估:即时将测量波前数据的结果与样品透镜或设计值进行比较和评估s
- 可重复的高精度:除了测量精度可达到λ/25(RMS)外,由于紧凑、坚固和抗振设计,还可实现λ/100(RMS)的高重复性。
该装置采用激光器、准直器、分束镜、反射镜等光学元件实现透射波前的检测。
红外波前测试设备也可以对涂有红外膜的玻璃进行测试。数据分析表明,该设备具有良好的重复性和稳定性,满足红外波前测试条件。
Test function | Transmissive wavefront | – | √ |
Reflective wavefront | – | √ | |
Optics | Wavelength | nm | 905 |
Laser power | watt | 0~33mw | |
Magnification factor | X | 16.2 or customized | |
Wavefront spatial resolution | pixel | Default resolution:73×45 | |
Or per customized magnification | |||
Wavefront accuracy | λ | λ / 25~80 | |
Test area size | mm | A circle of Φ80 or A rectangle with a diagonal length less than 80 | |
Test time | Takt time | – | Display images and results in real time |
Interface | Driving voltage | V | 220 |
Electrical power | watt | 100 | |
WFS cable | USB | ||
Dimension | Width | mm | 800 |
Length | mm | 1200 | |
Height | mm | 290 | |
Weight | kg | 150 | |
Environments | Operation temperature | ℃ | 22+/-12 |
Store temperature | deg | 22+/-20 |