Semiconductor

The system is mainly used for wafer inspection of semiconductor equipment. The wafer defect detection system developed by MLOptic has a wide field of view, which can greatly improve the resolution of the test, enhance the effective field of view and improve the detection speed. The modular design method will reduce the cost and maintenance frequency of the whole test system, and greatly reduce the maintenance time. At the same time, it can make the detection instrument control the micro defects to a higher level, which provides full support for accelerating the performance optimization and integrated configuration of wafer inspection equipment.

The product is used in the world’s top semiconductor measurement equipment, providing UV and deep UV precision optical systems.